Rao, Sandro and Nigro, Maria A. and Suriano, Francesco and Corte, Francesco G. Della and Summonte, Caterina and Scandurra, Alberto (2010) Design, fabrication and characterization of an α - Si:H / α - SiCN waveguide multistack for electro-optical modulation. In: 2nd Internationa ICST Conference on Nano-Networks.
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Abstract
This paper reports the design, fabrication and characterization of a planar waveguide based on an hydrogenated amorphous silicon (α-Si:H) - silicon carbonitride (SiCxNy) multistack for the realization of passive and active optical components at the wavelength 1.3--1.5 μm. The waveguide was realized
| Item Type: | Conference or Workshop Item (UNSPECIFIED) |
|---|---|
| Date Deposited: | 04 Mar 2026 09:19 |
| Last Modified: | 18 Apr 2026 06:33 |
| URI: | http://eprints.eai.eu/id/eprint/5165 |
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